Laser Scanning Confocal Microscope The advantages of confocal laser scanning microscope with the size and price of an IR camera
The combination of high contrast imaging, infrared capabilities, extremely small size and low cost enables many new applications
Conventional microscope image
LSCM Image Fiducial mark image collected through polished silicon wafe
LSCM Laser Scanning Confocal Microscope Key Benefits: • • • • • • •
High contrast monochrome imaging inherent to confocal microscopy Can be used as an accessory to infinity corrected optical microscopes Combining confocal microscopy with IR enables imaging through thick semi-opaque material Small size and low cost enables new applications Self-contained – no need for separate illumination Flexibility in parameter settings facilitates evolving applications Rugged construction designed for industrial applications
Main Features: • •
Application of fast XY scanner enables video rate imaging Various parameters are user adjustable Resolution Magnification Laser intensity Flip, rotate image
Frame rate Image contrast Detector sensitivity Line scan and area scan modes are user selectable
• Includes laser scanning confocal microscope, LSCM controller, controller cables (galvanometer, Data communication, power/interlock) and connector kit • Options available: Frame grabber with camera link cable Optical interface module to attachment any WDI autofocus sensor ‘Z’-axis actuator (ZAA) CCD camera with white LED illumination Beam splitter if required
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Choice of laser source from 600 to 1550 nm (1060, 1300, 1550 standard choices) Compact size - LSCM: 150 x 100 x 100mm, controller: 167 x 60 x 129mm Light weight - LSCM: 2.2kg, controller: 1.1kg. Warranty: 18 months
LSCM
Laser Scanning Confocal Microscope
Advantages of Confocal Laser Scanning Microscopy •
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By restricting the illumination to a single point which is scanned to produce a complete image (point scanning illumination) almost all the light emitting from regions above and below the focal plane of a confocal light microscope is physically prevented from contributing to the observed image, which thus contains only in-focus information. This endows the confocal microscope with significant axial resolutions, and permits its use for serial non-invasive optical scanning, and the acquisition of 3D image data. Out of focus blur is essentially absent from confocal images giving the capability for direct non-invasive serial optical sectioning of intact and living specimens such as biological cells and tissue. In a similar way, it allows profiling of the surface of 3D objects and multi-layer structures such as integrated circuits deposited on silicon or glass, again by non-contacting and non-destructive method.
It also has a small but significant improvement in lateral resolution. It rejects stray light not only from outof-focus specimen planes but also light scattered from within the optical instrument itself, resulting in increased contrast and signal-to-noise ratio in the final image. • It is also compatible with computer image storage techniques, allowing, for example, generation of highresolution digitized data sets of the 3D distribution of markers within cells or tissue, or the topography of a surface, suitable for subsequent image Industrial Applications of processing. Confocal Microscopy
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Thin Film Profiling: When investigating multilayer structures, the true surface of a substrate can be observed through a surface coating. The thickness of the coating can be determined by observing the 2 peaks in the axial intensity variation. It is necessary to know the refractive index of the film to account for the refractive depth distortion of the image. The resolution of this method, which can be used for more complex axial structures, is limited to about one wavelength. Metrology: The electronic form of its image signal is suitable for quantitative dimensional measurements and is enhanced because of improved axial resolution capabilities and that the plane of measurement can be accurately located. The magnification of the confocal image needs to be calibrated, as the nominal magnification of most objective lenses is not sufficiently exact. Inspection of semiconductor devices: There are many advantages over electron microscopy including the noninvasive nature avoiding the creation of surface defects and contamination and ability to image through non-conducting passivation layers.
LSCM Laser Scanning Confocal Microscope
LSCM Specifications: Scanner to objective offset: Detector:
177mm
Avalanche Photodetector
Illumination: Laser diode Standard choices: 1060, 1300, 1550nm Other choices: between 700nm and 1550nm Laser class: IIIB Parameter
Value
Comment
Maximum IP Pixel Resolution 1270 x 1000 pixel Maximum Field of View 1” CCD equivalent 800µm diam.at 20X (Example) Object Plane Resolution Diffraction limited Frame rate (user adjustable) 10.7 fps 19.8 fps (Example) Line scan mode: line rate 12 kHz speed (examples) 29.5mm/s at 1270 pixels at 5X 24 mm/s at 400 pixels at 20X
user adjustable (9.6 x 12.8mm) 320µm diam. at 50X (Example) wavelength & NA dependent at 1270 x 1000 pixels (Maximum) at 1270 x 480 pixels 96mm/s at 400 pixels at 5X
Input: +/-24V/2.5A (not supplied) Output:
Camera Link to Frame grabber (optional)
